Performance Analysis of Micro Heaters for Sensor Applications

This paper presents the architecture, simulation and analysis for sensor applications of Platinum micro-heaters. In order to investigate the thermal properties of individual electrically powered platinum micro-heaters, the Finite Element Method (FEM) analysis was used. Using COMSOL, the uniform distribution of heat and optimization of power usage for the micro-heaters were carried out by simulating various possible patterns. In the simulation, four separate micro-heater patterns were used and they are: (a) rectangular spiral, (b) diagonal slant, (c) double spiral and (d) complementary form of double spiral.

Author (s) Details

J. Kathirvelan
School of Electronics Engineering (SENSE), VIT University, Vellore, Tamilnadu, India.

R. Vijayaraghavan
School of Advanced Sciences (SAS), VIT University, Vellore, Tamilnadu, India.

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