Effect of Layer Thickness and Preparation Conditions on the Properties and Ethanol Sensitivity of ZnSe Thin Films

Thermal evaporation of ZnSe in vacuum deposits nanocrystalline layers of ZnSe with thicknesses ranging from 30-150 nm on Corning 7059 glass substrates at room temperature. At different deposition speeds, regularly interrupted vapour deposition is used. Some films are left at room temperature for up to 60 days, while others are annealed at temperatures of 200° C and 400° C. The structure, morphology, and optical properties of the films was studied using X-ray diffraction, atomic force microscopy, and spectroscopic ellipsometry. Ethanol sensing experiments are carried out in air at room temperature, and the results show that the sensitivity of the layers increases as the thickness and deposition rate decrease. The porosity of the film affects the sensitivity behaviour.

Author (s) Details

V. Dzhurkov
Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko chausse 72 Blvd, 1784 Sofia, Bulgaria.

Z. Levi
Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko chausse 72 Blvd, 1784 Sofia, Bulgaria.

D. Nesheva
Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko chausse 72 Blvd, 1784 Sofia, Bulgaria.

T. Hristova-Vasileva
Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko chausse 72 Blvd, 1784 Sofia, Bulgaria.

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