Gas Sensing Properties of Nanocrystalline Silicon Carbide Films: Experimental Results
The impact of the air environment on the electrical conductivity of nanocrystalline thin SiC films formed on sapphire by direct ion deposition was studied. Gas...
The impact of the air environment on the electrical conductivity of nanocrystalline thin SiC films formed on sapphire by direct ion deposition was studied. Gas...